Dual-channel precise temperature control: How does a 10kW variable-frequency dual-loop water chiller solve the temperature control problem in laser processing?

Published on: 2026-07-28 08:46

In high-end laser processing scenarios, such as semiconductor wafer cutting and precise welding, engineers often encounter a challenging problem: The laser unit requires the water temperature to be controlled within ±0.1℃ to ensure stable beam quality; while the optical cutting head needs to maintain a relatively high water temperature of 20-25℃ (with a fluctuation of ±0.5℃) to prevent condensation in humid environments from causing lens cracking. Traditional solutions often require the deployment of two separate chillers, which not only occupy space but may also interfere with each other, affecting overall stability. 
In response to this industry challenge, the FerroTec R&D team has innovatively launched a 10kW air-cooled variable-frequency compressor high-precision fiber coolant machine. Its key feature lies in: using only one variable-frequency compressor, through a dual circulation liquid circuit design, it can simultaneously meet the differentiated temperature control requirements of the laser source and optical components. 


I. Core Technology: Dual-control per machine, independent circulation 
This chiller adopts a dual-loop system architecture of "two water tanks + two water pumps + two plate-type heat exchangers": 


▲Schematic diagram of working principle 


CH1 loop (laser side): Adopting a 45L/min high-flow design, it serves the laser unit. Through the precise coordination of two electronic expansion valves (cooling in A + heating in B), it achieves an ultra-high temperature control accuracy of ±0.1℃. This means that even if the external environment fluctuates, the resonant cavity inside the laser remains at the optimal working temperature, effectively eliminating power instability caused by thermal drift. 


▲ Eliminate the formation of condensate water 


CH2 loop (optical component side): The CH2 loop is specifically designed for precision loads such as optical laser heads, with a temperature control accuracy of up to ±0.5℃. Its operating range covers 10 to 40℃ and has extremely strong environmental adaptability. In practical applications, it is recommended to set the water temperature within the "golden range" of 20 to 25℃ to suppress the thermal lens effect and ensure the long-term stability of beam quality and output power. The system uses an independent water pump and plate heat exchanger architecture to precisely maintain the water temperature slightly below the ambient temperature. This physically blocks the dew point at the cold and hot exchange interface, completely preventing the formation of condensate water, and effectively protecting the field lens and cutting head wire. 


II. Full Variable Frequency Power: Supplemented by Panasonic Compressor 
The entire power system of the machine is fully equipped with variable frequency technology: 
☑️ Variable-frequency compressor: We have selected a high-performance Panasonic rotor compressor. Under a 60Hz operating condition, its cooling capacity can reach 11.6kW, meeting the design target of 10kW. The compressor intelligently adjusts its speed based on the total heat load of the two circuits, avoiding water temperature fluctuations caused by frequent start-stop operations. 
☑️ Dual-variable frequency water pumps: The CH1 and CH2 circuits are equipped with independent variable-frequency water pumps, providing a rated flow of 45L/min and 10L/min respectively. The system can automatically adjust the pump speed according to changes in pipeline resistance, ensuring constant flow/pressure and unaffected by load variations. 
☑️ Intelligent PID temperature control algorithm: Based on the PLC control platform, it integrates multi-dimensional temperature and pressure sensing, and the PID closed-loop regulation ensures that the CH1 channel has an ultra-high temperature control accuracy of ±0.1℃. The system uses heat recovery technology to convert the exhaust waste heat from the compressor into approximately 1kW of usable thermal energy, completely replacing the traditional electric heating tubes for auxiliary heating. While ensuring industrial-grade temperature control stability, it effectively reduces unnecessary energy consumption and exhibits excellent COP performance. 


III. Focus on Details: Creating for Harsh Environments 
As a refrigeration equipment specifically designed for the semiconductor and high-end manufacturing sectors, it also pays attention to details: 
Medium compatibility: Supports deionized water and 15% ethylene glycol water solution, meeting the anti-freezing and insulation requirements of different processes. 
Industrial-grade protection: It can operate stably within an ambient temperature range of 5 to 40 °C. It is equipped with standard RS-232/RS-485 communication interfaces, facilitating integration into factory automation systems. 
Safe and reliable: Equipped with multiple sensors (temperature, pressure, water level), combined with overcurrent protection and leakage circuit breaker, it ensures continuous and reliable operation 24/7. 


In summary, the advent of this dual-channel cold water machine has precisely addressed the industry pain points in the thermal management of laser equipment. It not only fills the gap in domestic 10kW-level high-precision dual-channel equipment, but also provides strong temperature control support for the domestic substitution of semiconductor equipment.

 

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    Contact information:+8618590309368
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    E-mail:lihuif@ferrotec.com.cn
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