New Product Launch | High-Precision Four-Channel Chiller FCCWQ011-7402: Specifically Designed for Semiconductor Cleaning Equipment
In semiconductor manufacturing, the success of the cleaning process hinges on the precision and stability of temperature control. To address this, FerroTec has launched the FCCWQ011-7402 four-channel compressor chiller—specifically designed for semiconductor cleaning equipment. With its multi-channel independent temperature control and industrial-grade operational stability, it provides clean, reliable, and worry-free temperature control for advanced processes.
The FCCWQ011-7402 is a high-precision temperature control system employing vapor compression refrigeration. It features four independent temperature control channels, each capable of controlling a wide temperature range of -10℃ to +20℃ with a temperature control accuracy of ±0.1℃. It is primarily suitable for processes requiring extremely high temperature stability, such as semiconductor cleaning, etching, and resist removal.
● Specifically designed for semiconductor cleaning equipment
● Four-channel independent control
● High temperature control accuracy ±0.1℃
● Temperature control range for each channel: -10~20℃
● Supports product customization
High-precision four-channel chiller
1. Four-channel independent control
This chiller features four independent temperature control channels, each equipped with its own refrigeration system, water pump, and control system, enabling simultaneous operation of multiple process devices without interference. A single channel can provide up to 4kW of cooling capacity at -5℃, meeting the demands of high-load heat dissipation.
2. High-precision PID temperature control
The system employs a PID control algorithm, in conjunction with an electronic expansion valve and a variable frequency compressor, to achieve rapid response and stable temperature control. Minimal fluctuations in the outlet temperature provide a reliable guarantee for process consistency and high product yield.
3. High-efficiency water cooling system
This chiller uses water cooling and requires a cooling water source with a temperature of 20±2℃ and a maximum flow rate of 50L/min. Stable water temperature and sufficient flow rate ensure efficient heat dissipation, maintain long-term stable operation of the entire unit, and avoid performance degradation and shutdown risks caused by overheating.
4. Compatible with semiconductor process media
The circulating fluid is a 50% ethylene glycol aqueous solution, and all fluid contact parts are made of SUS316 stainless steel, possessing excellent corrosion resistance and chemical stability. It is environmentally friendly and pollution-free, meeting the stringent requirements of highly clean environments.
5. Multiple protection functions
The system has multiple safety functions, including high-pressure protection, refrigerant shortage protection, low liquid level protection, leak detection, and water pump overload protection. In the event of any abnormality, the system will automatically shut down and issue an alarm, effectively ensuring equipment safety and process continuity.
6. Equipped with a filter pressure reducing valve
This chiller is equipped with an SMC filter pressure reducing valve, which allows for quick and thorough emptying of the circulating liquid in the pipeline after use, thus simplifying the maintenance process.
7. Certified by SEMI S2 and F47
This chiller has passed SEMI S2 and F47 certifications, meeting the high standards required by the semiconductor industry for cooling equipment. It boasts excellent stability, precise control, cleanliness, reliability, and environmental adaptability, making it suitable for high-end applications such as semiconductor manufacturing, laser equipment, and precision instruments.
